Invention Grant
- Patent Title: Three-axis microelectromechanical system (MEMS) gyroscope
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Application No.: US17781724Application Date: 2020-04-02
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Publication No.: US11639852B2Publication Date: 2023-05-02
- Inventor: Bo Zou , Qinglong Zheng , Shuang Liu
- Applicant: Senodia Technologies (Shaoxing) Co., Ltd.
- Applicant Address: CN Shaoxing
- Assignee: Senodia Technologies (Shaoxing) Co., Ltd.
- Current Assignee: Senodia Technologies (Shaoxing) Co., Ltd.
- Current Assignee Address: CN Shaoxing
- Agency: Bayramoglu Law Offices LLC
- Priority: CN201911240938.X 20191206
- International Application: PCT/CN2020/082892 WO 20200402
- International Announcement: WO2021/109378 WO 20210610
- Main IPC: G01C19/5712
- IPC: G01C19/5712

Abstract:
A three-axis microelectromechanical system (MEMS) gyroscope includes four proof masses, where the proof masses are connected by spring beams and/or rigid beams; a first proof mass is configured to move in an X-axis direction; a second proof mass is configured to rotate around an X-direction axis, a Y-direction axis, and a Z-direction axis, and when the first proof mass moves in the X-axis direction, the second proof mass is driven to rotate around the Z-direction axis; a third proof mass is configured to move in the X-axis direction and a Y-axis direction, and when the first proof mass moves in the X-axis direction, the third proof mass is driven to move in the Y-axis direction; a fourth proof mass is configured to move in the X-axis direction, and when the third proof mass moves in the X-axis direction, the fourth proof mass is driven to move in the X-axis direction.
Public/Granted literature
- US20230010336A1 THREE-AXIS MICROELECTROMECHANICAL SYSTEM (MEMS) GYROSCOPE Public/Granted day:2023-01-12
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