Invention Grant
- Patent Title: Flow sensor
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Application No.: US17074898Application Date: 2020-10-20
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Publication No.: US11639864B2Publication Date: 2023-05-02
- Inventor: Andrea De Luca , Ethan Gardner , Syed Zeeshan Ali , Florin Udrea
- Applicant: Flusso Limited
- Applicant Address: GB Cambridgeshire
- Assignee: Flusso Limited
- Current Assignee: Flusso Limited
- Current Assignee Address: GB Cambridgeshire
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G01F1/688
- IPC: G01F1/688 ; G01F1/696

Abstract:
There is disclosed herein a flow sensor comprising: a first substrate comprising an etched portion; a dielectric layer located on the first substrate, where the dielectric layer comprises at least one dielectric membrane located over the etched portion of the first substrate; a first heating element and a second heating element located on or within the dielectric membrane; and a controller coupled with the first heating element and the second heating element. The first heating element and the second heating element are arranged to intersect one another within or over an area of the dielectric membrane. The controller is configured to: take a measurement from the second heating element; determine a calibration parameter using the measurement from the second heating element; take a measurement from the first heating element; and determine a flow rate through the flow sensor using the determined calibration parameter and the measurement from the first heating element.
Public/Granted literature
- US20210116282A1 FLOW SENSOR Public/Granted day:2021-04-22
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