Invention Grant
- Patent Title: Laminar flow restrictor
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Application No.: US16985540Application Date: 2020-08-05
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Publication No.: US11639865B2Publication Date: 2023-05-02
- Inventor: Sean Joseph Penley , Zachariah Ezekiel McIntyre , Tyler James Wright
- Applicant: Ichor Systems, Inc.
- Applicant Address: US CA Fremont
- Assignee: Ichor Systems, Inc.
- Current Assignee: Ichor Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: The Belles Group, P.C.
- Main IPC: F16K47/08
- IPC: F16K47/08 ; F16L55/027 ; G01F1/86 ; G01F5/00 ; F15D1/02 ; G01F1/40

Abstract:
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.
Public/Granted literature
- US20210041279A1 LAMINAR FLOW RESTRICTOR Public/Granted day:2021-02-11
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