Invention Grant
- Patent Title: Device including optofluidic sensor with integrated photodiode
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Application No.: US17195887Application Date: 2021-03-09
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Publication No.: US11639895B2Publication Date: 2023-05-02
- Inventor: Vibhor Jain , Steven M. Shank , Anthony K. Stamper , John J. Ellis-Monaghan , John J. Pekarik , Yusheng Bian
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G01N21/85 ; H01L31/0232 ; H01L31/12 ; H01L31/02

Abstract:
A “lab on a chip” includes an optofluidic sensor and components to analyze signals from the optofluidic sensor. The optofluidic sensor includes a substrate, a channel at least partially defined by a portion of a layer of first material on the substrate, input and output fluid reservoirs in fluid communication with the channel, at least a first radiation source coupled to the substrate adapted to generate radiation in a direction toward the channel, and at least one photodiode positioned adjacent and below the channel.
Public/Granted literature
- US20220291126A1 DEVICE INCLUDING OPTOFLUIDIC SENSOR WITH INTEGRATED PHOTODIODE Public/Granted day:2022-09-15
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