Invention Grant
- Patent Title: Substrate edge test apparatus, system, and method
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Application No.: US16606364Application Date: 2018-04-18
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Publication No.: US11639898B2Publication Date: 2023-05-02
- Inventor: Sung-chan Hwang , Ji Hwa Jung , Tae-ho Keem , SoYoung Song
- Applicant: Corning Incorporated
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Matthew J. Mason
- Priority: KR10-2017-0050020 20170418
- International Application: PCT/US2018/028048 WO 20180418
- International Announcement: WO2018/195132 WO 20181025
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/95 ; G02F1/13 ; G06T7/00

Abstract:
An apparatus for testing an edge portion of a substrate, includes a first illumination source configured to irradiate light to an end portion of the edge portion of the substrate; a second illumination source configured to irradiate light to a lower portion of the edge portion; a third illumination source configured to irradiate light to an upper portion of the edge portion; and first to third photographing portions, respectively corresponding to the first to third illumination sources, wherein the first illumination source comprises a C-shaped cross-section and comprises a first curved surface facing the end portion of the edge portion, the second illumination source comprises a half C-shaped cross-section and comprises a second curved surface facing the lower portion of the edge portion, and the third illumination source comprises a half C-shaped cross-section and comprises a third curved surface facing the upper portion of the edge portion.
Public/Granted literature
- US20230003661A1 SUBSTRATE EDGE TEST APPARATUS, SYSTEM, AND METHOD Public/Granted day:2023-01-05
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