Invention Grant
- Patent Title: Method and system for virtually executing an operation of an energy dispersive X-ray spectrometry (EDS) system in real-time production line
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Application No.: US17185559Application Date: 2021-02-25
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Publication No.: US11639906B2Publication Date: 2023-05-02
- Inventor: Shashank Shrikant Agashe , Gaurav Kumar , Priya Ranjan Sinha , Lakshmi Narayana Pedapudi , Avadhut Dipakrao Chaudhari , Dongwoo Lee , Taehyoung Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: IN202041050743 20201121
- Main IPC: H01J37/09
- IPC: H01J37/09 ; G01N23/2273 ; G01N23/2251

Abstract:
Provided is a method for virtually executing an operation of an energy dispersive x-ray spectrometry (EDS) system in real time production line by analyzing a defect included in a material undergoing inspection based on computer vision, the method including receiving a scanning electron microscope (SEM) image of the material including the defect, extracting an image-feature from the SEM image of the material, classifying the extracted image-feature under a predetermined label, predicting, based on the classified image-feature, an element associated with the defect included in the material and a shape of the predicted element, and grading the defect included in the material based on comparing the predicted element with a predetermined criteria.
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