Invention Grant
- Patent Title: Sensor and electric device
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Application No.: US17668230Application Date: 2022-02-09
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Publication No.: US11639946B2Publication Date: 2023-05-02
- Inventor: Hiroaki Yamazaki
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JPJP2021-149811 20210915
- Main IPC: G01R1/20
- IPC: G01R1/20 ; G01R19/00

Abstract:
According to one embodiment, a sensor includes a base including a first face including a first face region, and a first structure body fixed to the first face region. The first structure body includes a first support portion fixed to the first face region, a second support portion fixed to the first face region, a first movable portion, and a first fixed electrode fixed to the first face region. The first movable portion is supported by the first and second support portions and apart from the base in a first direction crossing the first face region. The first movable portion includes a first movable electrode facing the first fixed electrode, and a first conductive member. A first current flows the first conductive member along a second direction crossing the first direction. A first gap is provided between the first fixed electrode and the first movable portion.
Public/Granted literature
- US20230078060A1 SENSOR AND ELECTRIC DEVICE Public/Granted day:2023-03-16
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