A method for determining a sheet resistance of a sample (1) by using point probes. The method includes: (a) positioning (101) five point probes (2a, 2b, 2c, 2d, 2e) on the sample (1) at selected positions which are distanced from an edge of the sample (1): (b) connecting (102) the five point probes (2a, 2b, 2c, 2d, 2e) in five configurations wherein each configuration comprises a different set of four point probes (abcd, bcde, cdea, deab, eabc) and measuring (103) a resistance (r1=rabcd, r2=rbcde, r3=rcdea, r4=rdeab, r5=reabc) between the four point probes for each configuration; (c) determining (104) the sheet resistance (ρ0).