Invention Grant
- Patent Title: Predicting equipment fail mode from process trace
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Application No.: US17383334Application Date: 2021-07-22
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Publication No.: US11640328B2Publication Date: 2023-05-02
- Inventor: Richard Burch , Kazuki Kunitoshi
- Applicant: PDF Solutions, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: PDF Solutions, Inc.
- Current Assignee: PDF Solutions, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dergosits & Noah LLP
- Main IPC: G06F11/07
- IPC: G06F11/07 ; G01R31/28

Abstract:
A predictive model for equipment fail modes. An anomaly is detected in a collection of trace data, then key features are calculated. A search is conducted for the same or similar anomalies having the same key features in a database of past trace data. If the same anomaly occurred before and is in the database, then the type of anomaly, its root cause, and action steps to correct can be retrieved from the database.
Public/Granted literature
- US20220027230A1 Predicting Equipment Fail Mode from Process Trace Public/Granted day:2022-01-27
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