Invention Grant
- Patent Title: Method and apparatus for Schottky TFE inspection
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Application No.: US17319208Application Date: 2021-05-13
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Publication No.: US11640896B2Publication Date: 2023-05-02
- Inventor: Victor Katsap
- Applicant: NuFlare Technology, Inc. , NuFlare Technology America, Inc.
- Applicant Address: JP Kanagawa; US CA Sunnyvale
- Assignee: NuFlare Technology, Inc.,NuFlare Technology America, Inc.
- Current Assignee: NuFlare Technology, Inc.,NuFlare Technology America, Inc.
- Current Assignee Address: JP Kanagawa; US CA Sunnyvale
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/12 ; G01N23/2251 ; H01J37/073 ; H01J37/26

Abstract:
The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.
Public/Granted literature
- US20220367145A1 METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION Public/Granted day:2022-11-17
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