Invention Grant
- Patent Title: Crystal laminate, semiconductor device and method for manufacturing the same
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Application No.: US16617799Application Date: 2018-04-19
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Publication No.: US11640906B2Publication Date: 2023-05-02
- Inventor: Fumimasa Horikiri , Takehiro Yoshida , Tomoyoshi Mishima
- Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED , HOSEI UNIVERSITY
- Applicant Address: JP Tokyo; JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED,HOSEI UNIVERSITY
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED,HOSEI UNIVERSITY
- Current Assignee Address: JP Tokyo; JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2017-105756 20170529
- International Application: PCT/JP2018/016093 WO 20180419
- International Announcement: WO2018/221054 WO 20181206
- Main IPC: H01L21/20
- IPC: H01L21/20 ; C30B25/20 ; C30B29/38 ; C30B31/22 ; H01L21/265

Abstract:
Provided is a crystal laminate including: a crystal substrate formed from a monocrystal of group III nitride expressed by a compositional formula InxAlyGa1-x-yN (where 0≤x≤1, 0≤y≤1, 0≤x+y≤1), the crystal substrate containing at least any one of n-type impurity selected from the group consisting of Si, Ge, and O; and a crystal layer formed by a group III nitride crystal epitaxially grown on a main surface of the crystal substrate, at least any one of p-type impurity selected from the group consisting of C, Mg, Fe, Be, Zn, V, and Sb being ion-implanted in the crystal layer. The crystal laminate is configured in a manner such that an absorption coefficient of the crystal substrate for light with a wavelength of 2000 nm when the crystal substrate is irradiated with the light falls within a range of 1.8 cm−1 or more and 4.6 cm−1 or less under a temperature condition of normal temperature.
Public/Granted literature
- US20200227262A1 CRYSTAL LAMINATE, SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2020-07-16
Information query
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