Invention Grant
- Patent Title: Method for cutting off FIN field effect transistor
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Application No.: US17165806Application Date: 2021-02-02
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Publication No.: US11640910B2Publication Date: 2023-05-02
- Inventor: Yenchan Chiu , Yingju Chen , Liyao Liu , Chanyuan Hu
- Applicant: SHANGHAI HUALI INTEGRATED CIRCUIT CORPORATION
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI HUALI INTEGRATED CIRCUIT CORPORATION
- Current Assignee: SHANGHAI HUALI INTEGRATED CIRCUIT CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Alston & Bird LLP
- Priority: CN202011069653.7 20200930
- Main IPC: H01L21/308
- IPC: H01L21/308 ; H01L21/027 ; H01L21/306 ; H01L21/8238

Abstract:
A method for cutting off a fin in a field effect transistor, comprising: step 1: forming fins and first spacing regions, there are two types of fins—the first type is configured to be cut off and a second type is configured to be reserved; and forming a first material layer to fill the first spacing regions; step 2: forming a first pattern structure comprising first strip structures aligning to one first type fin and second spacing regions; step 3: forming second sidewalls on two sides of each first strip structure; step 4: removing the first strip structures to form a second pattern structure by the second sidewalls; step 5: etching away the first material layer and the first type of fins by using the second sidewalls as a mask ; step 6: removing the second sidewalls and the remaining first material layer. The present application enables using less advanced lithography equipment.
Public/Granted literature
- US20220102154A1 METHOD FOR CUTTING OFF FIN FIELD EFFECT TRANSISTOR Public/Granted day:2022-03-31
Information query
IPC分类: