Invention Grant
- Patent Title: Semiconductor device
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Application No.: US17375950Application Date: 2021-07-14
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Publication No.: US11640982B2Publication Date: 2023-05-02
- Inventor: Masatsugu Yutani , Yuki Shiraishi
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JPJP2020-130207 20200731
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/417 ; H01L29/66 ; H01L29/40 ; H01L29/78 ; H01L29/739

Abstract:
The present disclosure provides a semiconductor device. The semiconductor device includes a semiconductor chip having a first main surface including an active region and a peripheral region surrounding the active region; a first trench formed in the active region; a first insulating film formed on an inner surface of the first trench; a first electrode formed in the first trench interfacing the first insulating film, and forming a channel in a portion of the semiconductor chip facing the first insulating film; a second trench formed in the peripheral region and having a width greater a width of the first trench; a second insulating film formed on an inner surface of the second trench; and a second electrode formed in the second trench interfacing the second insulating film and electrically coupled to the first electrode.
Public/Granted literature
- US20220037488A1 SEMICONDUCTOR DEVICE Public/Granted day:2022-02-03
Information query
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