Invention Grant
- Patent Title: Manufacturing method of static random access memory cell
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Application No.: US16721657Application Date: 2019-12-19
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Publication No.: US11641729B2Publication Date: 2023-05-02
- Inventor: Jordan Hsu , Yu-Kuan Lin , Shau-Wei Lu , Chang-Ta Yang , Ping-Wei Wang , Kuo-Hung Lo
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L21/8238 ; H01L27/088 ; H01L21/8234 ; H01L27/092 ; H01L29/66 ; H01L29/49 ; H01L27/105

Abstract:
A method for manufacturing a SRAM cell includes forming a first p-well in a semiconductor substrate; forming a first semiconductor fin extending within the first p-well; forming a first mask layer over the first semiconductor fin; patterning the first mask layer to expose a first channel region of the first semiconductor fin, while leaving a second channel region of the first semiconductor fin covered by the first mask layer; with the patterned first mask layer in place, doping the first channel region of the first semiconductor fin with a first dopant; after doping the first channel region of the first semiconductor fin, removing the first mask layer from the second channel region; and forming a first gate structure extending across the first channel region of the first semiconductor fin and a second gate structure extending across the second channel region of the first semiconductor fin.
Information query
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