- Patent Title: Self-aligned etch back for vertical three dimensional (3D) memory
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Application No.: US17237664Application Date: 2021-04-22
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Publication No.: US11641732B2Publication Date: 2023-05-02
- Inventor: Litao Yang , Si-Woo Lee , Haitao Liu , Kamal M. Karda
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L27/11507 ; H01L27/11514

Abstract:
Systems, methods, and apparatuses are provided for self-aligned etch back for vertical three dimensional (3D) memory. One example method includes depositing layers of a first dielectric material, a semiconductor material, and a second dielectric material to form a vertical stack, forming first vertical openings to form elongated vertical, pillar columns with first vertical sidewalls in the vertical stack, and forming second vertical openings through the vertical stack to expose second vertical sidewalls. Further, the example method includes removing portions of the semiconductor material to form first horizontal openings and depositing a fill in the first horizontal openings. The method can further include forming third vertical openings to expose third vertical sidewalls in the vertical stack and selectively removing the fill material to form a plurality of second horizontal openings in which to form horizontally oriented storage nodes.
Public/Granted literature
- US20220344338A1 SELF-ALIGNED ETCH BACK FOR VERTICAL THREE DIMENSIONAL (3D) MEMORY Public/Granted day:2022-10-27
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