Invention Grant
- Patent Title: Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these
-
Application No.: US16590089Application Date: 2019-10-01
-
Publication No.: US11642704B2Publication Date: 2023-05-09
- Inventor: Tomoatsu Ishibashi
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP 14223754 2014.10.31
- The original application number of the division: US14920045 2015.10.22
- Main IPC: B08B3/10
- IPC: B08B3/10 ; H01L21/67

Abstract:
A roll-type cleaning member for scrubbing and cleaning a target cleaning surface of a substrate includes a plurality of nodules formed on a surface thereof. Each nodule includes a slit which extends so as not to be parallel to the rotation direction of the roll-type cleaning member, upstream edges are formed by the slit so as to serve as edges first contacting the target cleaning surface when a cleaning surface of the nodule contacts the target cleaning surface of the substrate by the rotation of the roll-type cleaning member, and the upstream edges are provided at a plurality of positions of the cleaning surface of the nodule in the circumferential direction.
Public/Granted literature
Information query
IPC分类: