Invention Grant
- Patent Title: Apparatus for polishing and method for polishing
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Application No.: US16532934Application Date: 2019-08-06
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Publication No.: US11642755B2Publication Date: 2023-05-09
- Inventor: Pohan Chen , Hiroshi Sotozaki , Tadakazu Sone
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP 2018147917 2018.08.06
- Main IPC: B24B49/00
- IPC: B24B49/00 ; B24B57/02 ; B24B37/10

Abstract:
An object of the present invention is to reduce an amount of use of the polishing liquid. There is provided an apparatus for polishing an object to be polished using a polishing pad having a polishing surface, the apparatus including: a polishing table for supporting the polishing pad, the polishing table being configured to be rotatable; a substrate holding unit configured to hold the object to be polished and press the object against the polishing pad; a supplying device for supplying polishing liquid to the polishing surface in a state in which the supplying device is pressed against the polishing pad; and a pressing mechanism configured to press the supplying device against the polishing pad, in which the pressing mechanism is capable of respectively adjusting pressing forces for pressing the sidewalls of on the upstream side and the downstream side of the supplying device against the polishing surface.
Public/Granted literature
- US11413723B2 Apparatus for polishing and method for polishing Public/Granted day:2022-08-16
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