Invention Grant
- Patent Title: Micro-electromechanical system package having movable platform
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Application No.: US17939205Application Date: 2022-09-07
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Publication No.: US11643325B2Publication Date: 2023-05-09
- Inventor: Chih-Ming Sun , Ming-Han Tsai , Yu-Tao Lee
- Applicant: PixArt Imaging Inc.
- Applicant Address: TW Hsin-Chu County
- Assignee: PIXART IMAGING INC.
- Current Assignee: PIXART IMAGING INC.
- Current Assignee Address: TW Hsin-Chu County
- Agency: WPAT, P.C
- The original application number of the division: US15891975 2018.02.08
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H01L27/146 ; H01L23/00 ; B81C1/00
Abstract:
A MEMS package including a fixed frame, a moveable platform and elastic restoring members is provided. The moveable platform is moved with respect to the fixed frame. The elastic restoring members are connected between the fixed frame and the moveable platform, and used to restore the moved moveable platform to an original position.
Public/Granted literature
- US20230002214A1 MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM Public/Granted day:2023-01-05
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