Invention Grant
- Patent Title: Tiltable and rotatable substrate carrier and multi-layer vacuum deposition system comprising same
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Application No.: US17773938Application Date: 2020-10-27
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Publication No.: US11643718B2Publication Date: 2023-05-09
- Inventor: Maxime Parailloux , Joël Fleury , Cyril Dupeyrat
- Applicant: SAFRAN ELECTRONICS & DEFENSE
- Applicant Address: FR Paris
- Assignee: SAFRAN ELECTRONICS & DEFENSE
- Current Assignee: SAFRAN ELECTRONICS & DEFENSE
- Current Assignee Address: FR Paris
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Priority: FR 12702 2019.11.14
- International Application: PCT/FR2020/051942 2020.10.27
- International Announcement: WO2021/094665A 2021.05.20
- Date entered country: 2022-05-03
- Main IPC: C23C14/50
- IPC: C23C14/50 ; C23C14/54 ; C23C14/24 ; H01L21/67 ; H01L21/687

Abstract:
A module for operating a carrier of one or more substrates to be treated in a vacuum deposition method includes a frame provided with a plate receiving, on a first side, an electronic assembly comprising radio transmitter/receiver electronics, a processor card, motor controller electronics and a battery for supplying power to the module. The processor card has a program memory with a program for controlling the motor controller electronics according to data received from a remote apparatus provided with a radio transmitting/receiving device for communicating with the module's radio transmitter/receiver electronics and, on a second side, a device for operating the carrier, which device is provided with a first motor for rotating the carrier about a first axis parallel to the plate and with a second motor for rotating the carrier about a second axis perpendicular to the plate.
Public/Granted literature
- US20220349043A1 TILTABLE AND ROTATABLE SUBSTRATE CARRIER AND MULTI-LAYER VACUUM DEPOSITION SYSTEM COMPRISING SAME Public/Granted day:2022-11-03
Information query
IPC分类: