An inductive position detector for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe. The coil board configuration includes a field generating coil configuration that surrounds a hole in the coil board configuration, a top axial sensing coil configuration and a bottom axial sensing coil configuration, and N top rotary sensing coils and N bottom rotary sensing coils. A stylus-coupled disruptor configuration includes a cylindrical disruptor element that is configured to move and fit within the hole of the coil board configuration, and moves along Z (axial) and X-Y (rotary) directions in a motion volume. The field generating coil configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the cylindrical disruptor element), and coil signals indicate the cylindrical disruptor element and/or stylus positions.