- Patent Title: Negative photoresist used for semiconductor encapsulation process
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Application No.: US17040850Application Date: 2019-12-11
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Publication No.: US11644750B2Publication Date: 2023-05-09
- Inventor: Wensheng Xiang , Kun Zhu , Lan Lu , Bing Zhang , Jianlong Zhao
- Applicant: JIANGSU AISEN SEMICONDUCTOR MATERIAL CO., LTD.
- Applicant Address: CN Qiandeng Town Kunshan
- Assignee: Jiangsu Aisen Semiconductor Material Co., Ltd.
- Current Assignee: Jiangsu Aisen Semiconductor Material Co., Ltd.
- Current Assignee Address: CN Qiandeng Town Kunshan
- Agency: Kirton McConkie
- Agent David B. Tingev; Bryant J. Keller
- Priority: CN 1811553209.5 2018.12.19
- International Application: PCT/CN2019/124611 2019.12.11
- International Announcement: WO2020/125520A 2020.06.25
- Date entered country: 2020-09-23
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/075

Abstract:
Provided is a negative photoresist used for a semiconductor encapsulation process, belonging to the technical field of semiconductor processing. A negative photoresist formulation includes 40-65 wt % of modified epoxy acrylate, 3-6 wt % of photosensitizer, 100-1000 ppm of leveling agent, and the remainder of solvent; the leveling agent is a solution of a 7:3 mass ratio of polydimethylsiloxane copolymer having a molecular weight of 3000-6000 and propylene glycol monomethyl ether acetate. If the negative photoresist is coated at a thickness of about 50 um, the coating uniformity can be controlled to below 5%, ensuring the quality of exposure such that the thickness of electroplated copper meets requirements.
Public/Granted literature
- US20210018838A1 NEGATIVE PHOTORESIST USED FOR SEMICONDUCTOR ENCAPSULATION PROCESS Public/Granted day:2021-01-21
Information query
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