Invention Grant
- Patent Title: Resist composition and method of forming resist pattern
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Application No.: US17114941Application Date: 2020-12-08
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Publication No.: US11644751B2Publication Date: 2023-05-09
- Inventor: Junichi Miyakawa , Masatoshi Arai , Takashi Nagamine
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: JP 2019224046 2019.12.11
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/039 ; C08F220/28 ; C08F220/18

Abstract:
A resist composition that generates an acid upon exposure is soluble in a developing solution, and is changed by action of an acid. The resist composition contains a resin component having solubility in a developing solution, which is changed by action of an acid, and has a constitutional unit represented by General Formula (a01-1) and a constitutional unit derived from a compound represented by General Formula (a02-1). In General Formula (a01-1), R represents a hydrogen atom, an alkyl group, or a halogenated alkyl group; Yax01 represents a single bond or a linking group; Ax represents a sulfonyl group or a sulfoxide group; and Rax01 represents an alkyl group, an alkoxy group, a halogen atom, or a halogenated alkyl group. In General Formula (a02-1), W represents a polymerizable group-containing group, Wax0 represents a cyclic group having an (nax0+1)-valent aromaticity, which may have a substituent, Wax0 may form a condensed ring with W, and nax0 represents an integer of 1 to 3
Public/Granted literature
- US20210181634A1 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2021-06-17
Information query
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