Invention Grant
- Patent Title: Polymer, positive resist composition, and method of forming resist pattern
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Application No.: US16468815Application Date: 2017-12-15
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Publication No.: US11644752B2Publication Date: 2023-05-09
- Inventor: Manabu Hoshino
- Applicant: ZEON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ZEON CORPORATION
- Current Assignee: ZEON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kenja IP Law PC
- Priority: JP 2016254084 2016.12.27
- International Application: PCT/JP2017/045204 2017.12.15
- International Announcement: WO2018/123667A 2018.07.05
- Date entered country: 2019-06-12
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/32 ; C08F212/08 ; C08L25/08 ; C08L27/04 ; C08L27/12 ; G03F7/16 ; G03F7/20

Abstract:
Provided is a polymer that when used as a main chain scission-type positive resist, can sufficiently inhibit resist pattern collapse, can favorably form a clear resist pattern, and can also improve sensitivity. The polymer includes a monomer unit (A) represented by general formula (I), shown below, and a monomer unit (B) represented by general formula (II), shown below. [In formula (I), R1 is an organic group including not fewer than 5 and not more than 7 fluorine atoms. In formula (II), R2 is a hydrogen atom, a fluorine atom, an unsubstituted alkyl group, or a fluorine atom-substituted alkyl group, R3 is a hydrogen atom, an unsubstituted alkyl group, or a fluorine atom-substituted alkyl group, p and q are each an integer of not less than 0 and not more than 5, and p+q=5.]
Public/Granted literature
- US20200073240A1 POLYMER, POSITIVE RESIST COMPOSITION, AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2020-03-05
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