- Patent Title: Control system for adaptive control of a thermal processing system
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Application No.: US17084228Application Date: 2020-10-29
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Publication No.: US11644817B2Publication Date: 2023-05-09
- Inventor: Michael X. Yang , Markus Lieberer , Joseph Cibere
- Applicant: Mattson Technology, Inc. , Beijing E-Town Semiconductor Technology, Co., LTD
- Applicant Address: US CA Fremont
- Assignee: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD,MATTSON TECHNOLOGY, INC.
- Current Assignee: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD,MATTSON TECHNOLOGY, INC.
- Current Assignee Address: CN Beijing; US CA Fremont
- Agency: Dority & Manning, P.A.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G05B19/4155

Abstract:
A control system operable to train a control tuner to generate temperature setpoint tracking improvements for a thermal processing system is provided. In one example implementation, temperature setpoint tracking improvements are achieved by generating system controller parameter adjustments based on a difference between a simulated workpiece temperature estimate and an actual workpiece temperature estimate. For example, a system model can generate a simulated workpiece temperature estimate simulating an actual workpiece temperature estimate, and based on the difference between the simulated and actual workpiece temperature estimates, generate clone controller parameter adjustments. The clone controller parameter adjustments can be used to generate system controller parameter adjustments, which can improve temperature setpoint tracking for the thermal processing system.
Public/Granted literature
- US20210132592A1 Control System For Adaptive Control Of A Thermal Processing System Public/Granted day:2021-05-06
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