Invention Grant
- Patent Title: Depositing apparatus
-
Application No.: US16856160Application Date: 2020-04-23
-
Publication No.: US11646180B2Publication Date: 2023-05-09
- Inventor: Kwanyong Lee , Sangmok Nam , Hyun-Woo Kim , Jaeho Byeon
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20190087246 2019.07.18
- Main IPC: H01J37/34
- IPC: H01J37/34 ; H01J37/32 ; C23C14/35

Abstract:
A deposition apparatus, including: a substrate supporter, wherein a substrate is fixed to the substrate supporter; a target facing the substrate; a first magnet assembly disposed below the target and including a first magnet extending in a first direction and having a first length, and a second magnet at least partially surrounding the first magnet; and a second magnet assembly disposed below the target and spaced apart from the first magnet assembly in a second direction which is substantially perpendicular to the first direction, and including a first magnet extending in the first direction and having a second length greater than the first length, and a second magnet at least partially surrounding the first magnet, and wherein the second magnet of the first magnet assembly and the second magnet of the second magnet assembly have substantially the same length as each other in the first direction.
Public/Granted literature
- US20210020417A1 DEPOSITING APPARATUS Public/Granted day:2021-01-21
Information query