Invention Grant
- Patent Title: Substrate treatment device
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Application No.: US17700515Application Date: 2022-03-22
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Publication No.: US11646212B2Publication Date: 2023-05-09
- Inventor: Hideji Naohara , Yuji Okita , Hiroaki Kakuma , Tatsuya Masui
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: JCIPRNET
- Priority: JP 2018189981 2018.10.05
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/02 ; H01L21/67 ; G06T7/00 ; G06T7/73 ; G06K9/62 ; G06T7/13 ; H04N5/235

Abstract:
A substrate treatment device is provided, including a substrate holding unit holding a substrate and rotating the substrate; plural nozzles each having a discharge port and discharging a treatment liquid from the discharge port at a treatment position; a camera imaging an imaging region from an imaging position to acquire captured images, the imaging region containing the treatment liquid discharged from the discharge port of each nozzle positioned at the treatment position, and the imaging position being above the substrate held on the substrate holding unit and in a plan view, the imaging position being positioned at a central side of the substrate with respect to the nozzles and at an upstream side in a rotation direction of the substrate holding unit with respect to the nozzles; and an image processing unit determining a discharge state of the treatment liquid based on the captured images.
Public/Granted literature
- US20220216117A1 SUBSTRATE TREATMENT DEVICE Public/Granted day:2022-07-07
Information query
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