Invention Grant
- Patent Title: Load port apparatus and method of driving the same
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Application No.: US17064637Application Date: 2020-10-07
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Publication No.: US11646215B2Publication Date: 2023-05-09
- Inventor: Tomoshi Abe , Hiroshi Hasegawa , Nozomu Kato , Hiroshi Igarashi , Tadamasa Iwamoto
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 2019184751 2019.10.07
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/673

Abstract:
A load port apparatus connects a main opening of a wafer transportation container to a frame opening. The apparatus includes an installation unit, a frame unit, a flange clamp unit, and a detection unit. The installation unit includes an installation table configured to install the container and relatively move to the frame opening. The frame unit is upright upward from the installation unit and includes the frame opening. The flange clamp unit includes an engagement section and a drive section. The engagement section is engageable with a flange surrounding an outer circumference of the main opening. The drive section drives the engagement section to carry out an engagement operation and a separation operation. The detection unit detects the engagement operation by the flange clamp unit with classification into a normal engagement operation and an abnormal engagement operation.
Public/Granted literature
- US20210104424A1 LOAD PORT APPARATUS AND METHOD OF DRIVING THE SAME Public/Granted day:2021-04-08
Information query
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