Invention Grant
- Patent Title: Sol gel coated support ring
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Application No.: US16857504Application Date: 2020-04-24
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Publication No.: US11646218B2Publication Date: 2023-05-09
- Inventor: Joseph M. Ranish
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- The original application number of the division: US15935469 2018.03.26
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67 ; C23C18/12
Abstract:
A support member for a thermal processing chamber is described. The support member has a sol coating on at least one surface. The sol coating contains a material that blocks a desired wavelength or spectrum of radiation from being transmitted by the material of the support member. The sol coating may be a multi-layer structure that may include adhesion layers, transition layers, and cap layers, in addition to radiation-blocking layers.
Public/Granted literature
- US20200251375A1 SOL GEL COATED SUPPORT RING Public/Granted day:2020-08-06
Information query
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