Invention Grant
- Patent Title: Metal lead, semiconductor device and methods of fabricating the same
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Application No.: US16977704Application Date: 2020-03-17
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Publication No.: US11646223B2Publication Date: 2023-05-09
- Inventor: Tian Zeng , Xing Hu
- Applicant: WUHAN XINXIN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: CN Hubei
- Assignee: WUHAN XINXIN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: WUHAN XINXIN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: CN Hubei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN 1911095493.0 2019.11.11
- International Application: PCT/CN2020/079615 2020.03.17
- International Announcement: WO2021/093238A 2021.05.20
- Date entered country: 2020-09-02
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L21/48 ; H01L23/528

Abstract:
A metal lead, a semiconductor device and method of fabricating the same are disclosed, in which a first trench is formed simultaneously with a wiring layer trench, followed by the formation of a second trench in communication with the first trench. After that, a conductive structure is formed simultaneously with a wiring layer by filling a conductive material simultaneously in the first, second and wiring layer trenches. In this way, it is neither necessary to externally connect the conductive structure by forming an additional opening, nor to form the wiring layer by etching a deposited aluminum layer. This saves the use of two photomasks, leading to savings in production cost.
Public/Granted literature
- US20210175117A1 METAL LEAD, SEMICONDUCTOR DEVICE AND METHODS OF FABRICATING THE SAME Public/Granted day:2021-06-10
Information query
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