Invention Grant
- Patent Title: Method of manufacturing a semiconductor package and apparatus for performing the same
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Application No.: US17218581Application Date: 2021-03-31
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Publication No.: US11646294B2Publication Date: 2023-05-09
- Inventor: Ungkeol Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR 20200110978 2020.09.01
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
In a method of manufacturing a semiconductor package, information with respect to a downward warpage of a reference package substrate, which may be bent with respect to a long axis and/or a short axis of the reference package substrate in applying heat to the reference package substrate to which a plurality of semiconductor chips may be attached using a die attach film (DAF), may be obtained. A package substrate, which may include a first surface to which the semiconductor chips may be attached using the DAF and a second surface opposite to the first surface, may be rotated with respect to the long axis or the short axis at an angle selected based on the information. The heat may be applied to the package substrate to cure the DAF and correct a warpage of the package substrate. Thus, warpage of the package substrate may be corrected for.
Public/Granted literature
- US20220068874A1 METHOD OF MANUFACTURING A SEMICONDUCTOR PACKAGE AND APPARATUS FOR PERFORMING THE SAME Public/Granted day:2022-03-03
Information query
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