- Patent Title: Semiconductor device, manufacturing method for same, and equipment
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Application No.: US17189477Application Date: 2021-03-02
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Publication No.: US11646334B2Publication Date: 2023-05-09
- Inventor: Takayuki Suzuki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JP 2020041217 2020.03.10
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A semiconductor device includes a semiconductor layer, a metal layer disposed above a surface of the semiconductor layer, a first barrier portion that covers a first portion of a surface of the metal layer, a second barrier portion that covers a second portion of the surface of the metal layer, an insulating film that covers the metal layer and the first and second barrier portions; and a metal member that is disposed in an opening portion provided in the insulating film, the metal member positioned on a third portion of the surface of the metal layer that is between the first portion and the second portion. A part of the insulating film is disposed between the metal member and the first barrier portion and between the metal member and the second barrier portion.
Public/Granted literature
- US20210288093A1 SEMICONDUCTOR DEVICE, MANUFACTURING METHOD FOR SAME, AND EQUIPMENT Public/Granted day:2021-09-16
Information query
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