Semiconductor device, manufacturing method for same, and equipment
Abstract:
A semiconductor device includes a semiconductor layer, a metal layer disposed above a surface of the semiconductor layer, a first barrier portion that covers a first portion of a surface of the metal layer, a second barrier portion that covers a second portion of the surface of the metal layer, an insulating film that covers the metal layer and the first and second barrier portions; and a metal member that is disposed in an opening portion provided in the insulating film, the metal member positioned on a third portion of the surface of the metal layer that is between the first portion and the second portion. A part of the insulating film is disposed between the metal member and the first barrier portion and between the metal member and the second barrier portion.
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