Invention Grant
- Patent Title: Semiconductor device and semiconductor storage device
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Application No.: US17190360Application Date: 2021-03-02
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Publication No.: US11646354B2Publication Date: 2023-05-09
- Inventor: Shinya Naito , Keiji Hosotani
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JP 2020158213 2020.09.23
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L29/423 ; H01L27/11519 ; H01L27/11524 ; H01L27/11565 ; H01L27/1157 ; H01L29/792 ; H01L21/28 ; H01L29/66 ; H01L29/788 ; H01L27/11582

Abstract:
A semiconductor device includes first and second gate electrodes, a semiconductor layer between the first and second gate electrodes and extending along a first direction, a first gate insulating layer between the first gate electrode and the semiconductor layer, a second gate insulating layer between the second gate electrode and the semiconductor layer, a first insulating layer including a first region adjacent to the first gate electrode in the first direction and contacting the semiconductor layer, and a second insulating layer extending including a second region adjacent to the second gate electrode in the first direction and contacting the semiconductor layer. An interface between the first region and the semiconductor layer in a direction crossing the first direction is adjacent to the first gate electrode in the first direction.
Public/Granted literature
- US20220093764A1 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2022-03-24
Information query
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