Invention Grant
- Patent Title: Shielded gate trench semiconductor apparatus and manufacturing method thereof
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Application No.: US17146353Application Date: 2021-01-11
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Publication No.: US11646355B2Publication Date: 2023-05-09
- Inventor: Yi Su
- Applicant: Nanjing Zizhu Microelectronics Co., Ltd.
- Applicant Address: CN Jiangsu
- Assignee: HUAYI MICROELECTRONICS CO., LTD.
- Current Assignee: HUAYI MICROELECTRONICS CO., LTD.
- Current Assignee Address: CN Xiamen
- Agency: Dragon Sun Law Firm, PC
- Agent Nathaniel Perkins
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L29/06 ; H01L29/423

Abstract:
The present application provides a shielded gate trench (SGT) semiconductor apparatus and a manufacturing method thereof. The SGT semiconductor apparatus includes a heavily N-type doped semiconductor substrate; an N-type epitaxial layer formed on the semiconductor substrate; at least one trench structure formed on the epitaxial layer and accommodating at least one gate polysilicon layer, where the trench structure includes a shielding polysilicon layer and an inter-polysilicon oxide layer; a P-type doped body and an N-type doped source layer formed on the epitaxial layer; a contact region formed for the source and the shield polysilicon connected to a source metal and the gate polysilicon connected to a gate meal. The SGT semiconductor apparatus is surrounded by a shield polysilicon termination trench; the gate polysilicon connected to the gate metal bus line is made outside the active region across the shield polysilicon termination trench.
Public/Granted literature
- US20220223708A1 SHIELDED GATE TRENCH SEMICONDUCTOR APPARATUS AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-07-14
Information query
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