- Patent Title: Three-dimensional memory devices and methods for forming the same
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Application No.: US17234774Application Date: 2021-04-19
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Publication No.: US11647629B2Publication Date: 2023-05-09
- Inventor: Hongbin Zhu
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- The original application number of the division: US16727872 2019.12.26
- Main IPC: H01L27/11578
- IPC: H01L27/11578 ; H01L27/1157 ; H01L29/423 ; H01L29/792

Abstract:
A method for forming a 3D memory device is disclosed. A gate electrode having an inverted “T” shape is formed above a substrate. A continuous blocking layer is formed on the gate electrode. A continuous charge trapping layer is formed on the blocking layer. A first thickness of a first part of the charge trapping layer extending laterally is greater than a second thickness of a second part of the charge trapping layer extending vertically. The second part of the charge trapping layer extending vertically is removed to form a plurality of discrete charge trapping layers disposed at different levels on the blocking layer from the first part of the charge trapping layer extending laterally. A continuous tunneling layer is formed on the discrete charge trapping layers. A continuous channel layer is formed on the tunneling layer.
Public/Granted literature
- US20210242233A1 THREE-DIMENSIONAL MEMORY DEVICES AND METHODS FOR FORMING THE SAME Public/Granted day:2021-08-05
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