Invention Grant
- Patent Title: Three-dimensional memory devices with supporting structure for staircase region
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Application No.: US17085305Application Date: 2020-10-30
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Publication No.: US11647632B2Publication Date: 2023-05-09
- Inventor: Kun Zhang , Linchun Wu , Zhong Zhang , Wenxi Zhou , Zongliang Huo
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L27/1158
- IPC: H01L27/1158 ; H01L25/18 ; H01L21/768 ; H01L23/00 ; H01L25/00 ; H01L27/11582

Abstract:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack, a first semiconductor layer, a supporting structure, a second semiconductor layer, and a plurality of channel structures. The memory stack includes vertically interleaved conductive layers and dielectric layers and has a core array region and a staircase region in a plan view. The first semiconductor layer is above and overlaps the core array region of the memory stack. The supporting structure is above and overlaps the staircase region of the memory stack. The supporting structure and the first semiconductor layer are coplanar. The second semiconductor layer is above and in contact with the first semiconductor layer and the supporting structure. Each channel structure extends vertically through the core array region of the memory stack and the first semiconductor layer into the second semiconductor layer.
Public/Granted literature
- US20220037353A1 THREE-DIMENSIONAL MEMORY DEVICES WITH SUPPORTING STRUCTURE FOR STAIRCASE REGION Public/Granted day:2022-02-03
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