Invention Grant
- Patent Title: Substrate polishing apparatus and polishing liquid discharge method in substrate polishing apparatus
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Application No.: US16638711Application Date: 2018-08-20
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Publication No.: US11648638B2Publication Date: 2023-05-16
- Inventor: Tetsuji Togawa , Kenichi Kobayashi
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Leydig Voit and Mayer, Ltd.
- Priority: JP 2017158473 2017.08.21
- International Application: PCT/JP2018/030613 2018.08.20
- International Announcement: WO2019/039419A 2019.02.28
- Date entered country: 2020-02-12
- Main IPC: B24B37/04
- IPC: B24B37/04 ; B24B57/02 ; H01L21/306

Abstract:
In a substrate polishing apparatus where a polishing liquid passes through inside a rotary joint, the rotary joint requires maintenance. There is provided a substrate polishing apparatus that includes: a polishing head for holding a substrate; a rotary table that has a surface to which a first opening portion is provided; a polishing liquid discharge mechanism disposed to the rotary table; and a controller configured to control at least the polishing liquid discharge mechanism. The polishing liquid discharge mechanism includes a first cylinder, a first piston, and a driving mechanism that drives the first piston. The first opening portion is communicated with a liquid holding space defined by the first cylinder and the first piston. The controller controls the driving of the first piston by the driving mechanism to increase and decrease a volume of the liquid holding space.
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