Piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus
Abstract:
A piezoelectric actuator includes: a diaphragm plate; a first electrode provided on or over the diaphragm plate; a piezoelectric substance layer provided on or over the first electrode; and a second electrode provided on or over the piezoelectric substance layer; wherein the piezoelectric substance layer includes a plurality of active portions sandwiched between the first electrode and the second electrode, either one of the first electrode and the second electrode is an individual electrode provided individually for each of the plurality of active portions, the other of the first electrode and the second electrode is a common electrode that is common to the plurality of active portions, and lead-out wiring is multiple-connected to the individual electrode.
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