Invention Grant
- Patent Title: Diaphragm assembly with non-uniform pillar distribution
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Application No.: US17385084Application Date: 2021-07-26
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Publication No.: US11649161B2Publication Date: 2023-05-16
- Inventor: Vahid Naderyan , Mohammad Mohammadi , Xin Song
- Applicant: Knowles Electronics, LLC
- Applicant Address: US IL Itasca
- Assignee: KNOWLES ELECTRONICS, LLC
- Current Assignee: KNOWLES ELECTRONICS, LLC
- Current Assignee Address: US IL Itasca
- Agency: Flener IP & Business Law
- Agent Zareefa B. Flener
- Main IPC: H04R7/00
- IPC: H04R7/00 ; B81B3/00 ; H04R7/04
Abstract:
A microelectromechanical systems (MEMS) diaphragm assembly comprises a first diaphragm and a second diaphragm. A plurality of pillars connects the first and second diaphragms, wherein the plurality of pillars has a higher distribution density at a geometric center of the MEMS diaphragm assembly than at an outer periphery thereof.
Public/Granted literature
- US20230027068A1 DIAPHRAGM ASSEMBLY WITH NON-UNIFORM PILLAR DISTRIBUTION Public/Granted day:2023-01-26
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