Invention Grant
- Patent Title: Method for depositing large-area graphene layer and apparatus for continuous graphene deposition
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Application No.: US17116656Application Date: 2020-12-09
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Publication No.: US11649544B2Publication Date: 2023-05-16
- Inventor: Dong Ho Yoon , Chul Kyu Song , Ji Hye Han , Soon Gil Yoon , Ji Ho Eom
- Applicant: KUK-IL GRAPHENE CO., LTD
- Applicant Address: KR Seongnam-si
- Assignee: KUK-IL GRAPHENE CO., LTD
- Current Assignee: KUK-IL GRAPHENE CO., LTD
- Current Assignee Address: KR Seongnam-si
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: KR 20190163901 2019.12.10
- Main IPC: C23C16/26
- IPC: C23C16/26 ; C23C14/14 ; C23C14/58 ; C23C28/00 ; C23C16/50 ; C23C16/44

Abstract:
A method for depositing a large-area graphene layer and an apparatus for continuous graphene deposition using the same are disclosed. The method can include forming a titanium (Ti) layer on a substrate by sputtering, reducing the titanium layer by spraying a reductant gas containing a hydrogen gas (H2) and a purge gas onto the titanium layer while moving in a first direction in relation to the substrate and exhausting the reductant gas and the purge gas. The method can also include forming graphene by spraying a reactant gas containing a graphene source and the purge gas onto the titanium layer while moving in a second direction opposite the first direction in relation to the substrate and exhausting the reactant gas and the purge gas.
Public/Granted literature
- US20210172059A1 METHOD FOR DEPOSITING LARGE-AREA GRAPHENE LAYER AND APPARATUS FOR CONTINUOUS GRAPHENE DEPOSITION Public/Granted day:2021-06-10
Information query
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