Invention Grant
- Patent Title: Resist composition and method of forming resist pattern
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Application No.: US16682431Application Date: 2019-11-13
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Publication No.: US11650497B2Publication Date: 2023-05-16
- Inventor: Yasuhiro Yoshii , Yoichi Hori
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: JP 2018219733 2018.11.22
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; G03F7/038 ; G03F7/16 ; G03F7/40 ; G03F7/20 ; G03F7/32 ; G03F7/38

Abstract:
A resist composition which generates an acid upon exposure and whose solubility in a developing solution is changed due to an action of the acid, the resist composition including a base material component whose solubility in a developing solution is changed due to the action of an acid, an acid generator component which generates an acid upon exposure, and an organic acid which contains at least one carboxy group, in which the acid generator component contains a compound represented by formula (b1) in which R2011 to R2031 represent an aryl group, an alkyl group, or an alkenyl group. R2011 to R2031 have a total of four or more substituents containing fluorine atoms, Xn− represent an n-valent anion, and n represents an integer of 1 or greater.
Public/Granted literature
- US20200166837A1 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2020-05-28
Information query
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