Invention Grant
- Patent Title: Resist underlayer film-forming composition containing novolac resin reacted with aromatic methylol compound
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Application No.: US15502600Application Date: 2015-08-04
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Publication No.: US11650505B2Publication Date: 2023-05-16
- Inventor: Hirokazu Nishimaki , Rikimaru Sakamoto , Keisuke Hashimoto , Takafumi Endo
- Applicant: NISSAN CHEMICAL INDUSTRIES, LTD.
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 2014162367 2014.08.08
- International Application: PCT/JP2015/072081 2015.08.04
- International Announcement: WO2016/021594A 2016.02.11
- Date entered country: 2017-02-08
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/038 ; G03F7/039 ; G03F7/09 ; G03F7/16 ; G03F7/32 ; G03F7/20 ; C08G12/26 ; C08G14/06 ; C09D161/34 ; H01L21/308 ; H01L21/311 ; G03F7/38

Abstract:
A resist underlayer film for lithography has high solubility in a resist solvent (solvent used in lithography) for expressing good coating film forming property and a smaller selection ratio of dry etching rate as compared with a resist. A resist underlayer film-forming composition containing a novolac resin containing a structure (C) obtained by a reaction of an aromatic ring of an aromatic compound (A) with a hydroxy group-containing aromatic methylol compound (B). The aromatic compound (A) may be a component constituting the structure (C) in the novolac resin. The hydroxy group-containing aromatic methylol compound (B) may be a compound of Formula (1):
The hydroxy group-containing aromatic methylol compound (B) may be 2-hydroxybenzyl alcohol, 4-hydroxybenzyl alcohol, or 2,6-di-tert-butyl-4-hydroxymethyl phenol.
The hydroxy group-containing aromatic methylol compound (B) may be 2-hydroxybenzyl alcohol, 4-hydroxybenzyl alcohol, or 2,6-di-tert-butyl-4-hydroxymethyl phenol.
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