Invention Grant
- Patent Title: Knowledge recommendation for defect review
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Application No.: US16479199Application Date: 2018-01-15
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Publication No.: US11650576B2Publication Date: 2023-05-16
- Inventor: Wei Fang , Cho Huak Teh , Robeter Jian , Yi-Ying Wang , Shih-Tsung Chen , Jian-Min Liao , Chuan Li , Zhaohui Guo , Pang-Hsuan Huang , Shao-Wei Lai , Shih-Tsung Hsu
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL AH Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- International Application: PCT/EP2018/050903 2018.01.15
- International Announcement: WO2018/134158A 2018.07.26
- Date entered country: 2019-07-18
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06K9/62 ; G06N5/02 ; G05B19/418 ; G06F18/24

Abstract:
A server for knowledge recommendation for defect review. The server includes a processor electronically coupled to an electronic storage device storing a plurality of knowledge files related to wafer defects. The processor is configured to execute a set of instruction to cause the server to: receive a request for knowledge recommendation for inspecting an inspection image from a defect classification server; search for a knowledge file in the electronic storage device that matches the inspection image; and transmit the search result to the defect classification server.
Information query