Invention Grant
- Patent Title: Mass spectrometer
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Application No.: US17345080Application Date: 2021-06-11
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Publication No.: US11651946B2Publication Date: 2023-05-16
- Inventor: Yusuke Sakagoshi
- Applicant: SHIMADZU CORPORATION
- Applicant Address: JP Kyoto
- Assignee: SHIMADZU CORPORATION
- Current Assignee: SHIMADZU CORPORATION
- Current Assignee Address: JP Kyoto
- Agency: Sughrue Mion, PLLC
- Priority: JP 2020154315 2020.09.15
- Main IPC: H01J49/24
- IPC: H01J49/24 ; H01J49/42

Abstract:
A mass spectrometer includes a vacuum chamber, a turbomolecular pump, and a roughing pump. The vacuum chamber is divided into a low vacuum chamber and a high vacuum chamber respectively provided with, on their wall surfaces, a first opening and a second opening. The turbomolecular pump has an operation chamber including in its inside a blade rotor and being provided with a first intake port, and an exhaust chamber communicating with the operation chamber and being provided with a second intake port and an exhaust port. The turbomolecular pump is placed so that the high vacuum chamber and the operation chamber communicate with each other through the second opening and the first intake port, and the low vacuum chamber and the exhaust chamber communicate with each other through the first opening and the second intake port. The roughing pump is connected to the exhaust port.
Public/Granted literature
- US20220084807A1 MASS SPECTROMETER Public/Granted day:2022-03-17
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