Invention Grant
- Patent Title: Processing of workpieces using fluorocarbon plasma
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Application No.: US17217019Application Date: 2021-03-30
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Publication No.: US11651977B2Publication Date: 2023-05-16
- Inventor: Shanyu Wang , Chun Yan
- Applicant: Mattson Technology, Inc. , Beijing E-Town Semiconductor Technology, Co., LTD
- Applicant Address: US CA Fremont
- Assignee: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD,MATTSON TECHNOLOGY, INC.
- Current Assignee: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD,MATTSON TECHNOLOGY, INC.
- Current Assignee Address: CN Beijing; US CA Fremont
- Agency: Dority & Manning, P.A.
- Main IPC: H01L21/3065
- IPC: H01L21/3065 ; H01L21/67 ; H01J37/32 ; H01L21/3213 ; H01L21/02
Abstract:
Methods for processing a workpiece are provided. Conducting a thermal treatment on a workpiece are provided. The workpiece contains at least one layer of metal. The method can include generating one or more species from a process gas. The process gas can include hydrogen or deuterium. The method can include filtering the one or more species to create a filtered mixture and exposing the workpiece to the filtered mixture. An oxidation process on a workpiece are provided. The method can be conducted at a process temperature of less than 350° C.
Public/Granted literature
- US20210305071A1 Processing of Workpieces Using Flourocarbon Plasma Public/Granted day:2021-09-30
Information query
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