Invention Grant
- Patent Title: Apparatus, system, and method for handling aligned wafer pairs
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Application No.: US17029635Application Date: 2020-09-23
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Publication No.: US11651983B2Publication Date: 2023-05-16
- Inventor: Hale Johnson , Gregory George
- Applicant: SUSS MicroTec Lithography GmbH
- Applicant Address: DE Garching
- Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
- Current Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
- Current Assignee Address: DE Garching
- Agency: Hayes Soloway PC
- The original application number of the division: US15150689 2016.05.10
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/677 ; H01L21/683 ; H01L23/00 ; H01L21/67

Abstract:
An industrial-scale apparatus, system, and method for handling precisely aligned and centered semiconductor wafer pairs for wafer-to-wafer aligning and bonding applications includes an end effector having a frame member and a floating carrier connected to the frame member with a gap formed therebetween, wherein the floating carrier has a semi-circular interior perimeter. The centered semiconductor wafer pairs are positionable within a processing system using the end effector under robotic control. The centered semiconductor wafer pairs are bonded together without the presence of the end effector in the bonding device.
Public/Granted literature
- US20210013079A1 APPARATUS, SYSTEM, AND METHOD FOR HANDLING ALIGNED WAFER PAIRS Public/Granted day:2021-01-14
Information query
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