Invention Grant
- Patent Title: Semiconductor memory device and electronic system including the same
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Application No.: US17488727Application Date: 2021-09-29
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Publication No.: US11652056B2Publication Date: 2023-05-16
- Inventor: Ha-Min Hwang , Jong Soo Kim , Ju-Young Lim , Won Seok Cho
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR 20210004321 2021.01.13
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/535 ; H01L25/18 ; H01L23/00 ; H01L21/768

Abstract:
A semiconductor memory device includes a first substrate including a first region and a second region, a stacked structure only on the first region of the first substrate among the first region and the second region of the first substrate, the stacked structure including word lines, an interlayer insulating film covering the stacked structure, a dummy conductive structure inside the interlayer insulating film, the dummy conductive structure extending through the stacked structure to contact the first substrate, and a plate contact plug inside the interlayer insulating film, the plate contact plug being connected to the second region of the first substrate, and a height of an upper surface of the dummy conductive structure being greater than a height of an upper surface of the plate contact plug relative to an upper surface of the first substrate.
Public/Granted literature
- US20220223525A1 SEMICONDUCTOR MEMORY DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME Public/Granted day:2022-07-14
Information query
IPC分类: