Invention Grant
- Patent Title: Photo-detecting apparatus with low dark current
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Application No.: US17278645Application Date: 2020-08-27
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Publication No.: US11652184B2Publication Date: 2023-05-16
- Inventor: Yen-Cheng Lu , Yun-Chung Na
- Applicant: ARTILUX, INC.
- Applicant Address: US CA Menlo Park
- Assignee: Artilux, Inc.
- Current Assignee: Artilux, Inc.
- Current Assignee Address: US CA Menlo Park
- Agency: Fish & Richardson P.C.
- International Application: PCT/US2020/048292 2020.08.27
- International Announcement: WO2021/041742A 2021.03.04
- Date entered country: 2021-03-22
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L31/107 ; H01L31/02 ; H01L27/146

Abstract:
A photo-detecting apparatus is provided. The photo-detecting apparatus includes a carrier conducting layer having a first surface; an absorption region is doped with a first dopant having a first conductivity type and a first peak doping concentration, wherein the carrier conducting layer is doped with a second dopant having a second conductivity type and a second peak doping concentration, wherein the carrier conducting layer comprises a material different from a material of the absorption region, wherein the carrier conducting layer is in contact with the absorption region to form at least one heterointerface, wherein a ratio between the first peak doping concentration of the absorption region and the second peak doping concentration of the carrier conducting layer is equal to or greater than 10; and a first electrode and a second electrode both formed over the first surface of the carrier conducting layer.
Public/Granted literature
- US20220181378A1 PHOTO-DETECTING APPARATUS WITH LOW DARK CURRENT Public/Granted day:2022-06-09
Information query
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