Invention Grant
- Patent Title: Electrically tunable surface acoustic wave resonator
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Application No.: US16008634Application Date: 2018-06-14
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Publication No.: US11652463B2Publication Date: 2023-05-16
- Inventor: Sergej Markmann , Gian R. von Salis
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Erik K. Johnson
- Main IPC: H03H9/02
- IPC: H03H9/02 ; G06N10/00 ; H01L41/29 ; H03H3/08 ; H03H9/145 ; H03H9/25

Abstract:
A surface acoustic wave resonator device comprises a substrate supporting: a gateable, electrically conducting layer; an interdigital transducer (IDT); a reflector grating that comprises a plurality of electrically separated fingers; a main ohmic contact; and a gate element. The IDT is configured to be connectable to a ground. The conducting layer is configured to be connectable to the ground via the main ohmic contact, while each of said fingers is electrically connected to a lateral side of the conducting layer. This defines a gateable channel, which extends from the fingers to the ground via the conducting layer and the main ohmic contact. The gate element is electrically insulated from the conducting layer. The gate element is configured to allow an electrical impedance of the gateable channel to be continuously tuned by applying a voltage bias to this gate element with respect to the ground, in operation of the device.
Public/Granted literature
- US20190386632A1 ELECTRICALLY TUNABLE SURFACE ACOUSTIC WAVE RESONATOR Public/Granted day:2019-12-19
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