Invention Grant
- Patent Title: Resonance device, oscillator, resonance module, electronic device and vehicle
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Application No.: US16828631Application Date: 2020-03-24
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Publication No.: US11653571B2Publication Date: 2023-05-16
- Inventor: Yoshihiko Yokoyama
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP 2019057427 2019.03.25
- Main IPC: H03B5/32
- IPC: H03B5/32 ; H01L41/053 ; H01L41/09 ; H03H9/10 ; H03H9/19 ; H01L41/18 ; H01L41/047 ; H01L41/312

Abstract:
A resonance device includes a first substrate formed of a semiconductor material or a glass material and having a recess which has an opening in a first main surface, a second substrate bonded to the first main surface and configured to close the opening of the recess, and a resonator element housed in the recess. An inner surface of the recess includes a side surface, a bottom surface, and a connection surface connecting the side surface and the bottom surface, the connection surface is a curved surface, and L1
Public/Granted literature
- US20200313070A1 RESONANCE DEVICE, OSCILLATOR, RESONANCE MODULE, ELECTRONIC DEVICE AND VEHICLE Public/Granted day:2020-10-01
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