Invention Grant
- Patent Title: Laser processing apparatus
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Application No.: US16906252Application Date: 2020-06-19
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Publication No.: US11654511B2Publication Date: 2023-05-23
- Inventor: Hiroshi Morikazu
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JP 2019120713 2019.06.28
- Main IPC: B23K26/0622
- IPC: B23K26/0622 ; H01L33/00

Abstract:
A laser processing apparatus includes a chuck table for holding a workpiece, a laser beam applying unit for applying a pulsed laser beam to the workpiece held by the chuck table while positioning spots of the pulsed laser beam on the workpiece, thereby processing the workpiece with the pulsed laser beam, and a control unit for controlling operation of the laser beam applying unit. The laser beam applying unit includes a laser oscillator for oscillating pulsed laser to emit a pulsed laser beam, a decimator for decimating pulses of the pulsed laser beam to adjust a repetitive frequency thereof, a scanner for scanning the spots of the pulsed laser beam over the workpiece at predetermined intervals, and an fθ lens for focusing the pulsed laser beam.
Information query
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